IEST RP-CC031.2 Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components

Recommended Practice by Institute of Environmental Sciences and Technology, 01/01/2008

Full Description

REPLACED 9/1/2011 by IEST RP-CC031.3: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components

This document is no longer being maintained as an IEST Recommended Practice and is for historical reference only. It may contain outdated material and has been superseded by a new version or another Recommended Practice.

This newly revised Recommended Practice (RP) describes a method for characterizing organic compounds outgassed from materials or components exposed to air or gasses in cleanrooms and other controlled environments. IEST RP-CC031.2 is relevant to industries that may experience adverse production yields as a result of gaseous organic contamination, also known as volatile organic compounds (VOCs) and semivolatile organic compounds (SVOCs). This document provides both a semiquantitative determination and a qualitative identification of a large range of compounds detectable by dynamic headspace gas chromatography-mass spectrometry (GC-MS).