IEST RP-CC012.3
Considerations in Cleanroom Design
Recommended Practice by Institute of Environmental Sciences and Technology, 02/01/2015
Full Description
This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.